Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM

Mami SAITO; Kumi OKUWADA; Soichi NADAHARA

Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM

Mami SAITO, Kumi OKUWADA, Soichi NADAHARA

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Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.

Publication: IEICE TRANSACTIONS on Electronics Vol.E84-C No.6 pp.802-807

Publication Date: 2001/06/01

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Type of Manuscript: Special Section PAPER (Special Issue on Nonvolatile Memories)

Category: FeRAMs

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Mami SAITO, Kumi OKUWADA, Soichi NADAHARA, "Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM" in IEICE TRANSACTIONS on Electronics, vol. E84-C, no. 6, pp. 802-807, June 2001, doi: .
Abstract: Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e84-c_6_802/_p

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@ARTICLE{e84-c_6_802,
author={Mami SAITO, Kumi OKUWADA, Soichi NADAHARA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM},
year={2001},
volume={E84-C},
number={6},
pages={802-807},
abstract={Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.},
keywords={},
doi={},
ISSN={},
month={June},}

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TY - JOUR
TI - Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM
T2 - IEICE TRANSACTIONS on Electronics
SP - 802
EP - 807
AU - Mami SAITO
AU - Kumi OKUWADA
AU - Soichi NADAHARA
PY - 2001
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E84-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 2001
AB - Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.
ER -