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Characteristics of MOSFET with Non-overlapped Source-Drain to Gate

Hyunjin LEE, Sung-il CHANG, Jongho LEE, Hyungcheol SHIN

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Summary :

A MOSFET structure with non-overlapped source-drain to gate region is proposed to overcome the challenges in sub-0.1 µm CMOS device. Key device characteristics were investigated by extensive simulation study. Fringing gate electric field through the dielectric spacer induces inversion layer in the non-overlap region to act as extended S/D region. Electrons were induced reasonably under the spacer. Internal physics and speed characteristics were studied with the non-overlap distance. The proposed structure had good subthreshold slope and DIBL characteristics compared to those of overlapped structure.

Publication
IEICE TRANSACTIONS on Electronics Vol.E85-C No.5 pp.1079-1085
Publication Date
2002/05/01
Publicized
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DOI
Type of Manuscript
Special Section PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
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