A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology

Menghan SONG; Tamio IKEHASHI

doi:10.1587/transele.2023ECP5019

A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology

Menghan SONG, Tamio IKEHASHI

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A novel charge pump, Capacitance Varying Charge Pump (CVCP) is proposed. This charge pump is composed of variable capacitors and rectifiers, and the charge transfer is attained by changing the capacitance values in a manner similar to peristaltic pumps. The analysis of multi-stage CVCP reveals that the output voltage is exponentially dependent on the stage number. Thus, compared with the Dickson charge pump, this charge pump has an advantage in generating high voltages with small stages. As a practical example of CVCP, we present an implementation realized by a MEMS (Micro-Electro-Mechanical Systems) technology. Here, the variable capacitor is enabled by a comb-capacitor attached to a high-quality factor resonator. As the rectifier, a PN-junction diode formed in the MEMS layer is used. Simulations including the mechanical elements are carried out for this MEMS version of CVCP. The simulation results on the output voltage and load characteristics are shown to coincide well with the theoretical estimations. The MEMS CVCP is suited for MEMS devices and vibration energy harvesters.

Publication: IEICE TRANSACTIONS on Electronics Vol.E107-C No.1 pp.1-11

Publication Date: 2024/01/01

Publicized: 2023/06/26

Online ISSN: 1745-1353

DOI: 10.1587/transele.2023ECP5019

Type of Manuscript: PAPER

Category: Electronic Circuits

Authors

Menghan SONG
University of Waseda IPS
Tamio IKEHASHI
University of Waseda IPS

Keyword

charge pump, MEMS, comb-capacitor, resonator, diode

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Menghan SONG, Tamio IKEHASHI, "A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology" in IEICE TRANSACTIONS on Electronics, vol. E107-C, no. 1, pp. 1-11, January 2024, doi: 10.1587/transele.2023ECP5019.
Abstract: A novel charge pump, Capacitance Varying Charge Pump (CVCP) is proposed. This charge pump is composed of variable capacitors and rectifiers, and the charge transfer is attained by changing the capacitance values in a manner similar to peristaltic pumps. The analysis of multi-stage CVCP reveals that the output voltage is exponentially dependent on the stage number. Thus, compared with the Dickson charge pump, this charge pump has an advantage in generating high voltages with small stages. As a practical example of CVCP, we present an implementation realized by a MEMS (Micro-Electro-Mechanical Systems) technology. Here, the variable capacitor is enabled by a comb-capacitor attached to a high-quality factor resonator. As the rectifier, a PN-junction diode formed in the MEMS layer is used. Simulations including the mechanical elements are carried out for this MEMS version of CVCP. The simulation results on the output voltage and load characteristics are shown to coincide well with the theoretical estimations. The MEMS CVCP is suited for MEMS devices and vibration energy harvesters.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2023ECP5019/_p

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@ARTICLE{e107-c_1_1,
author={Menghan SONG, Tamio IKEHASHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology},
year={2024},
volume={E107-C},
number={1},
pages={1-11},
abstract={A novel charge pump, Capacitance Varying Charge Pump (CVCP) is proposed. This charge pump is composed of variable capacitors and rectifiers, and the charge transfer is attained by changing the capacitance values in a manner similar to peristaltic pumps. The analysis of multi-stage CVCP reveals that the output voltage is exponentially dependent on the stage number. Thus, compared with the Dickson charge pump, this charge pump has an advantage in generating high voltages with small stages. As a practical example of CVCP, we present an implementation realized by a MEMS (Micro-Electro-Mechanical Systems) technology. Here, the variable capacitor is enabled by a comb-capacitor attached to a high-quality factor resonator. As the rectifier, a PN-junction diode formed in the MEMS layer is used. Simulations including the mechanical elements are carried out for this MEMS version of CVCP. The simulation results on the output voltage and load characteristics are shown to coincide well with the theoretical estimations. The MEMS CVCP is suited for MEMS devices and vibration energy harvesters.},
keywords={},
doi={10.1587/transele.2023ECP5019},
ISSN={1745-1353},
month={January},}

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TY - JOUR
TI - A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology
T2 - IEICE TRANSACTIONS on Electronics
SP - 1
EP - 11
AU - Menghan SONG
AU - Tamio IKEHASHI
PY - 2024
DO - 10.1587/transele.2023ECP5019
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E107-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 2024
AB - A novel charge pump, Capacitance Varying Charge Pump (CVCP) is proposed. This charge pump is composed of variable capacitors and rectifiers, and the charge transfer is attained by changing the capacitance values in a manner similar to peristaltic pumps. The analysis of multi-stage CVCP reveals that the output voltage is exponentially dependent on the stage number. Thus, compared with the Dickson charge pump, this charge pump has an advantage in generating high voltages with small stages. As a practical example of CVCP, we present an implementation realized by a MEMS (Micro-Electro-Mechanical Systems) technology. Here, the variable capacitor is enabled by a comb-capacitor attached to a high-quality factor resonator. As the rectifier, a PN-junction diode formed in the MEMS layer is used. Simulations including the mechanical elements are carried out for this MEMS version of CVCP. The simulation results on the output voltage and load characteristics are shown to coincide well with the theoretical estimations. The MEMS CVCP is suited for MEMS devices and vibration energy harvesters.
ER -