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Alumina Passivation Films Prepared by Wet Process for Silicon Solar Cells Using Aluminum Isopropoxide as a Sol-Gel Precursor

Ryosuke WATANABE, Mizuho KAWASHIMA, Yoji SAITO

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Summary :

We prepared alumina passivation films for p-type silicon substrates by sol-gel wet process mainly using aluminum isopropoxide (Al(O-i-Pr)3) as a precursor material. The precursor solution was spin-coated onto p-type silicon substrates and then calcined for 1 hour in air. Minority carrier lifetime of the passivated wafers was evaluated for different calcination temperature conditions. We also compared the passivation quality of the alumina passivation films using different alumina precursor, aluminum acetylacetonate (Al(acac)3). Obtained effective minority carrier lifetime indicated that the lifetime is strongly depends on the calcination temperature. The substrate calcined below 400°C shows relatively short lifetime below 100 µsec. On the other hand, the substrate calcined around 500°C to 600°C indicates lifetime from 250 to 300 µsec. Calcination temperature dependence of the lifetime for the samples using Al(O-i-Pr)3 precursors shows almost the same as that using Al(acac)3.

Publication
IEICE TRANSACTIONS on Electronics Vol.E100-C No.1 pp.108-111
Publication Date
2017/01/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E100.C.108
Type of Manuscript
BRIEF PAPER
Category
Semiconductor Materials and Devices

Authors

Ryosuke WATANABE
  Seikei University
Mizuho KAWASHIMA
  Seikei University
Yoji SAITO
  Seikei University

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