A New Eco-Friendly Photo Resist Stripping Technology Using  Ethylene Carbonate

Hiromitsu OTA; Hirofumi OTSUBO; Motonori YANAGI; Hisashi FUJII; Yoshihito KAMIMOTO

doi:10.1587/transele.E93.C.1607

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A New Eco-Friendly Photo Resist Stripping Technology Using "Ethylene Carbonate"

Hiromitsu OTA, Hirofumi OTSUBO, Motonori YANAGI, Hisashi FUJII, Yoshihito KAMIMOTO

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Summary :

Recently, it is demanded to form a high performance pattern on an enlarged circuit board in a low cost in the process to produce LCD devices. In the part of upgrading the performance, the materials are reexamined such as Al or Mo to Cu. Furthermore, in the process of reexamining the materials, it is demanded that such materials are low in environmental load. Therefore, we examined if it is possible to reuse Ethylene Carbonate, a photo resist stripper, with low environmental load by decomposing dissolved photo resist using ozone gas. Furthermore, we examined if it is possible to apply Ethylene Carbonate without damaging the next generation wiring materials. As a result, we were able to identify the most efficient condition for ozone gas to recycle Ethylene Carbonate used as a photo resist stripper. Ethylene Carbonate was not only suitable for Al · Mo wiring, but was also suitable for the next generation Cu wiring. Therefore by using Ethylene Carbonate for the new and old process for stripping photo resists, it is able to reduce the environmental load and also reduce the cost for stripping.

Publication: IEICE TRANSACTIONS on Electronics Vol.E93-C No.11 pp.1607-1611

Publication Date: 2010/11/01

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Online ISSN: 1745-1353

DOI: 10.1587/transele.E93.C.1607

Type of Manuscript: Special Section INVITED PAPER (Special Section on Electronic Displays)

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Hiromitsu OTA, Hirofumi OTSUBO, Motonori YANAGI, Hisashi FUJII, Yoshihito KAMIMOTO, "A New Eco-Friendly Photo Resist Stripping Technology Using "Ethylene Carbonate"" in IEICE TRANSACTIONS on Electronics, vol. E93-C, no. 11, pp. 1607-1611, November 2010, doi: 10.1587/transele.E93.C.1607.
Abstract: Recently, it is demanded to form a high performance pattern on an enlarged circuit board in a low cost in the process to produce LCD devices. In the part of upgrading the performance, the materials are reexamined such as Al or Mo to Cu. Furthermore, in the process of reexamining the materials, it is demanded that such materials are low in environmental load. Therefore, we examined if it is possible to reuse Ethylene Carbonate, a photo resist stripper, with low environmental load by decomposing dissolved photo resist using ozone gas. Furthermore, we examined if it is possible to apply Ethylene Carbonate without damaging the next generation wiring materials. As a result, we were able to identify the most efficient condition for ozone gas to recycle Ethylene Carbonate used as a photo resist stripper. Ethylene Carbonate was not only suitable for Al · Mo wiring, but was also suitable for the next generation Cu wiring. Therefore by using Ethylene Carbonate for the new and old process for stripping photo resists, it is able to reduce the environmental load and also reduce the cost for stripping.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E93.C.1607/_p

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@ARTICLE{e93-c_11_1607,
author={Hiromitsu OTA, Hirofumi OTSUBO, Motonori YANAGI, Hisashi FUJII, Yoshihito KAMIMOTO, },
journal={IEICE TRANSACTIONS on Electronics},
title={A New Eco-Friendly Photo Resist Stripping Technology Using "Ethylene Carbonate"},
year={2010},
volume={E93-C},
number={11},
pages={1607-1611},
abstract={Recently, it is demanded to form a high performance pattern on an enlarged circuit board in a low cost in the process to produce LCD devices. In the part of upgrading the performance, the materials are reexamined such as Al or Mo to Cu. Furthermore, in the process of reexamining the materials, it is demanded that such materials are low in environmental load. Therefore, we examined if it is possible to reuse Ethylene Carbonate, a photo resist stripper, with low environmental load by decomposing dissolved photo resist using ozone gas. Furthermore, we examined if it is possible to apply Ethylene Carbonate without damaging the next generation wiring materials. As a result, we were able to identify the most efficient condition for ozone gas to recycle Ethylene Carbonate used as a photo resist stripper. Ethylene Carbonate was not only suitable for Al · Mo wiring, but was also suitable for the next generation Cu wiring. Therefore by using Ethylene Carbonate for the new and old process for stripping photo resists, it is able to reduce the environmental load and also reduce the cost for stripping.},
keywords={},
doi={10.1587/transele.E93.C.1607},
ISSN={1745-1353},
month={November},}

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TY - JOUR
TI - A New Eco-Friendly Photo Resist Stripping Technology Using "Ethylene Carbonate"
T2 - IEICE TRANSACTIONS on Electronics
SP - 1607
EP - 1611
AU - Hiromitsu OTA
AU - Hirofumi OTSUBO
AU - Motonori YANAGI
AU - Hisashi FUJII
AU - Yoshihito KAMIMOTO
PY - 2010
DO - 10.1587/transele.E93.C.1607
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E93-C
IS - 11
JA - IEICE TRANSACTIONS on Electronics
Y1 - November 2010
AB - Recently, it is demanded to form a high performance pattern on an enlarged circuit board in a low cost in the process to produce LCD devices. In the part of upgrading the performance, the materials are reexamined such as Al or Mo to Cu. Furthermore, in the process of reexamining the materials, it is demanded that such materials are low in environmental load. Therefore, we examined if it is possible to reuse Ethylene Carbonate, a photo resist stripper, with low environmental load by decomposing dissolved photo resist using ozone gas. Furthermore, we examined if it is possible to apply Ethylene Carbonate without damaging the next generation wiring materials. As a result, we were able to identify the most efficient condition for ozone gas to recycle Ethylene Carbonate used as a photo resist stripper. Ethylene Carbonate was not only suitable for Al · Mo wiring, but was also suitable for the next generation Cu wiring. Therefore by using Ethylene Carbonate for the new and old process for stripping photo resists, it is able to reduce the environmental load and also reduce the cost for stripping.
ER -