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4H-SiC Avalanche Photodiodes for 280 nm UV Detection

Ho-Young CHA, Hyuk-Kee SUNG, Hyungtak KIM, Chun-Hyung CHO, Peter M. SANDVIK

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Summary :

We designed and fabricated 4H-SiC PIN avalanche photodiodes (APD) for UV detection. The thickness of an intrinsic layer in a PIN structure was optimized in order to achieve the highest quantum efficiency at the wavelength of interest. The optimized 4H-SiC PIN APDs exhibited a maximum external quantum efficiency of >80% at the wavelength of 280 nm and a gain greater than 40000. Both electrical and optical characteristics of the fabricated APDs were in agreement with those predicted from simulation.

Publication
IEICE TRANSACTIONS on Electronics Vol.E93-C No.5 pp.648-650
Publication Date
2010/05/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E93.C.648
Type of Manuscript
BRIEF PAPER
Category
Compound Semiconductor Devices

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