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Effects of Field Plate and Buried Gate Structures on Silicon Carbide Metal-Semiconductor Field-Effect Transistors

Jae-Gil LEE, Chun-Hyung CHO, Ho-Young CHA

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Summary :

We investigated the effects of various field plate and buried gate structures on the DC and small signal characteristics of 4H-silicon carbide (SiC) metal-semiconductor field-effect transistors (MESFETs). In comparison with the source-connected field plate, the gate-connected field plate exhibited superior frequency response while having similar DC characteristics. In order to further enhance the output power, dual field plates were employed in conjunction with a buried gate structure.

Publication
IEICE TRANSACTIONS on Electronics Vol.E94-C No.5 pp.842-845
Publication Date
2011/05/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E94.C.842
Type of Manuscript
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
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