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Effect of Dimethylselenium Supply Rate on Growth of Cu(In, Ga)Se2 Films

Masahiro TAHASHI, Kenji IINUMA, Hideo GOTO, Kenji YOSHINO, Makoto TAKAHASHI, Toshiyuki IDO

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Summary :

Polycrystalline Cu(In,Ga)Se2 (CIGS) films were prepared by heat treatment of metallic precursors using dimethylselenium (Se(CH3)2), which is a less hazardous Se source than H2Se gas. CIGS films were fabricated at various Se(CH3)2 supply rates. We investigated the effect of the Se(CH3)2 supply rate on the crystal phase and surface morphology of the films.

Publication
IEICE TRANSACTIONS on Electronics Vol.E95-C No.7 pp.1304-1306
Publication Date
2012/07/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E95.C.1304
Type of Manuscript
BRIEF PAPER
Category
Semiconductor Materials and Devices

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