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Recent Situation of the UV Imprint Lithography and Its Application to the Photonics Devices
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Summary :
The individual steps of UV imprint lithography have been explained in detail from the points of manufacturing nano-structures. The applications to photonic devices have been also introduced.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E99-C No.3 pp.333-338
- Publication Date
- 2016/03/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1587/transele.E99.C.333
- Type of Manuscript
- Special Section INVITED PAPER (Special Section on Progress towards System Nanotechnology)
- Category
Authors
Masashi NAKAO
Micro System Integration Center of Tohoku University,Dernaechste Co., Ltd.
Keyword
Latest Issue
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Masashi NAKAO, "Recent Situation of the UV Imprint Lithography and Its Application to the Photonics Devices" in IEICE TRANSACTIONS on Electronics,
vol. E99-C, no. 3, pp. 333-338, March 2016, doi: 10.1587/transele.E99.C.333.
Abstract: The individual steps of UV imprint lithography have been explained in detail from the points of manufacturing nano-structures. The applications to photonic devices have been also introduced.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E99.C.333/_p
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@ARTICLE{e99-c_3_333,
author={Masashi NAKAO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Recent Situation of the UV Imprint Lithography and Its Application to the Photonics Devices},
year={2016},
volume={E99-C},
number={3},
pages={333-338},
abstract={The individual steps of UV imprint lithography have been explained in detail from the points of manufacturing nano-structures. The applications to photonic devices have been also introduced.},
keywords={},
doi={10.1587/transele.E99.C.333},
ISSN={1745-1353},
month={March},}
Copy
TY - JOUR
TI - Recent Situation of the UV Imprint Lithography and Its Application to the Photonics Devices
T2 - IEICE TRANSACTIONS on Electronics
SP - 333
EP - 338
AU - Masashi NAKAO
PY - 2016
DO - 10.1587/transele.E99.C.333
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E99-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2016
AB - The individual steps of UV imprint lithography have been explained in detail from the points of manufacturing nano-structures. The applications to photonic devices have been also introduced.
ER -
English
