Surface Acoustic Wave Transducers Made by Anodic Oxidation
Summary :
A new technique for fabricating surface acoustic wave transducers is proposed. By using this technique, an IDT with oxide loaded in the space between the metal electrode fingers is easily realized. The fabricated transducers had ripple free response as well as the low velocity dispersion.
- Publication
- IEICE TRANSACTIONS on transactions Vol.E63-E No.9 pp.672-673
- Publication Date
- 1980/09/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- LETTER
- Category
- Components
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Mineo UEKI, Kota ONUKI, Shokichiro YOSHIKAWA, "Surface Acoustic Wave Transducers Made by Anodic Oxidation" in IEICE TRANSACTIONS on transactions,
vol. E63-E, no. 9, pp. 672-673, September 1980, doi: .
Abstract: A new technique for fabricating surface acoustic wave transducers is proposed. By using this technique, an IDT with oxide loaded in the space between the metal electrode fingers is easily realized. The fabricated transducers had ripple free response as well as the low velocity dispersion.
URL: https://global.ieice.org/en_transactions/transactions/10.1587/e63-e_9_672/_p
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@ARTICLE{e63-e_9_672,
author={Mineo UEKI, Kota ONUKI, Shokichiro YOSHIKAWA, },
journal={IEICE TRANSACTIONS on transactions},
title={Surface Acoustic Wave Transducers Made by Anodic Oxidation},
year={1980},
volume={E63-E},
number={9},
pages={672-673},
abstract={A new technique for fabricating surface acoustic wave transducers is proposed. By using this technique, an IDT with oxide loaded in the space between the metal electrode fingers is easily realized. The fabricated transducers had ripple free response as well as the low velocity dispersion.},
keywords={},
doi={},
ISSN={},
month={September},}
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TY - JOUR
TI - Surface Acoustic Wave Transducers Made by Anodic Oxidation
T2 - IEICE TRANSACTIONS on transactions
SP - 672
EP - 673
AU - Mineo UEKI
AU - Kota ONUKI
AU - Shokichiro YOSHIKAWA
PY - 1980
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E63-E
IS - 9
JA - IEICE TRANSACTIONS on transactions
Y1 - September 1980
AB - A new technique for fabricating surface acoustic wave transducers is proposed. By using this technique, an IDT with oxide loaded in the space between the metal electrode fingers is easily realized. The fabricated transducers had ripple free response as well as the low velocity dispersion.
ER -
English
