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Automatic Deconvolution in DLTS Signals Analysis

Kunihiro ASADA, Takuo SUGANO

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Summary :

The deconvolution of DLTS signals for multiple deep traps has been automated to reduce the data processing time of DLTS signals analysis and to improve the accuracy of the measurement. A linear non-recursive optimum filter is used for the deconvolution and peak-chaining algorithm has been developed to automate the Arrhenius plotting procedure. The design of the filter, the peak-chaining algorithm and an example of the deconvoluted DLTS signal are described as well as a performance evaluation of the method.

Publication
IEICE TRANSACTIONS on transactions Vol.E65-E No.12 pp.745-749
Publication Date
1982/12/25
Publicized
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DOI
Type of Manuscript
PAPER
Category
Semiconductors

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