IEICE TRANSACTIONS on transactions
Effects of Sputter-Etching on Ca-Doped Bi:GdIG Films for Making Low-Loss Optical Waveguides
Summary :
The optical absorption loss of Ca doped LPE grown rare earth iron garnet films can be reduced by the reducing treatment. The absorption loss is greatly affected by Ar sputter-etching whereas it is shown that the reducing treatment after O2 sputter-etching is suitable for making low-loss waveguides.
- Publication
- IEICE TRANSACTIONS on transactions Vol.E70-E No.11 pp.1077-1079
- Publication Date
- 1987/11/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section LETTER (Special Issue: Papers from 1987 National Conference on Semicondutor Devices and Materials IEICE)
- Category
- Optoelectronics
Authors
Keyword
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Santi K. SURIYATHUMRONG, Honming MAK, Tetsuya MIZUMOTO, Yoshiyuki NAITO, "Effects of Sputter-Etching on Ca-Doped Bi:GdIG Films for Making Low-Loss Optical Waveguides" in IEICE TRANSACTIONS on transactions,
vol. E70-E, no. 11, pp. 1077-1079, November 1987, doi: .
Abstract: The optical absorption loss of Ca doped LPE grown rare earth iron garnet films can be reduced by the reducing treatment. The absorption loss is greatly affected by Ar sputter-etching whereas it is shown that the reducing treatment after O2 sputter-etching is suitable for making low-loss waveguides.
URL: https://global.ieice.org/en_transactions/transactions/10.1587/e70-e_11_1077/_p
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@ARTICLE{e70-e_11_1077,
author={Santi K. SURIYATHUMRONG, Honming MAK, Tetsuya MIZUMOTO, Yoshiyuki NAITO, },
journal={IEICE TRANSACTIONS on transactions},
title={Effects of Sputter-Etching on Ca-Doped Bi:GdIG Films for Making Low-Loss Optical Waveguides},
year={1987},
volume={E70-E},
number={11},
pages={1077-1079},
abstract={The optical absorption loss of Ca doped LPE grown rare earth iron garnet films can be reduced by the reducing treatment. The absorption loss is greatly affected by Ar sputter-etching whereas it is shown that the reducing treatment after O2 sputter-etching is suitable for making low-loss waveguides.},
keywords={},
doi={},
ISSN={},
month={November},}
Copy
TY - JOUR
TI - Effects of Sputter-Etching on Ca-Doped Bi:GdIG Films for Making Low-Loss Optical Waveguides
T2 - IEICE TRANSACTIONS on transactions
SP - 1077
EP - 1079
AU - Santi K. SURIYATHUMRONG
AU - Honming MAK
AU - Tetsuya MIZUMOTO
AU - Yoshiyuki NAITO
PY - 1987
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E70-E
IS - 11
JA - IEICE TRANSACTIONS on transactions
Y1 - November 1987
AB - The optical absorption loss of Ca doped LPE grown rare earth iron garnet films can be reduced by the reducing treatment. The absorption loss is greatly affected by Ar sputter-etching whereas it is shown that the reducing treatment after O2 sputter-etching is suitable for making low-loss waveguides.
ER -
English
