Effect of Film Thickness on Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads

Tomohiro NAKAMORI; Taiji TSURUOKA; Takashi KANAMORI; Susumu SHIBATA

Effect of Film Thickness on Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads

Tomohiro NAKAMORI, Taiji TSURUOKA, Takashi KANAMORI, Susumu SHIBATA

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Change in film properties, especially resistivity and the thermal dependence of resistance, that are due to differences in the thickness and the temperature of heat treatment of Ta-Si-C films developed as high resistivity materials were investigated. From these results, the mechanism of film thermal changes was discussed. Further, the effect of film thickness on the performance of Ta-Si-C thin film thermal printing heads was also investigated. The results show that; (1) a ln ρT^-1/2 relationship between resistivity and temperature in Ta-Si-C thin films holds good over a wide temperature range from 293 to 873 K, (2) resistivity is dependent of film thickness when film thickness is less than 2000 (greater resistivity in thinner films), (3) the thermal dependence of resistance is dependent on film thickness when film thickness is less than 3000 (greater thermal dependence in thinner films), (4) resistivity is increased and thermal dependence of resistance is decreased by heat treatment below 400 , and that (5) excellent performance is achieved when Ta-Si-C thin films greater than 3000 in thickness are used as the thermal printing head resistor film.

Publication: IEICE TRANSACTIONS on transactions Vol.E70-E No.11 pp.1133-1139

Publication Date: 1987/11/25

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Category: Materials

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Tomohiro NAKAMORI
Taiji TSURUOKA
Takashi KANAMORI
Susumu SHIBATA

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Tomohiro NAKAMORI, Taiji TSURUOKA, Takashi KANAMORI, Susumu SHIBATA, "Effect of Film Thickness on Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads" in IEICE TRANSACTIONS on transactions, vol. E70-E, no. 11, pp. 1133-1139, November 1987, doi: .
Abstract: Change in film properties, especially resistivity and the thermal dependence of resistance, that are due to differences in the thickness and the temperature of heat treatment of Ta-Si-C films developed as high resistivity materials were investigated. From these results, the mechanism of film thermal changes was discussed. Further, the effect of film thickness on the performance of Ta-Si-C thin film thermal printing heads was also investigated. The results show that; (1) a ln ρT^-1/2 relationship between resistivity and temperature in Ta-Si-C thin films holds good over a wide temperature range from 293 to 873 K, (2) resistivity is dependent of film thickness when film thickness is less than 2000 (greater resistivity in thinner films), (3) the thermal dependence of resistance is dependent on film thickness when film thickness is less than 3000 (greater thermal dependence in thinner films), (4) resistivity is increased and thermal dependence of resistance is decreased by heat treatment below 400 , and that (5) excellent performance is achieved when Ta-Si-C thin films greater than 3000 in thickness are used as the thermal printing head resistor film.
URL: https://global.ieice.org/en_transactions/transactions/10.1587/e70-e_11_1133/_p

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@ARTICLE{e70-e_11_1133,
author={Tomohiro NAKAMORI, Taiji TSURUOKA, Takashi KANAMORI, Susumu SHIBATA, },
journal={IEICE TRANSACTIONS on transactions},
title={Effect of Film Thickness on Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads},
year={1987},
volume={E70-E},
number={11},
pages={1133-1139},
abstract={Change in film properties, especially resistivity and the thermal dependence of resistance, that are due to differences in the thickness and the temperature of heat treatment of Ta-Si-C films developed as high resistivity materials were investigated. From these results, the mechanism of film thermal changes was discussed. Further, the effect of film thickness on the performance of Ta-Si-C thin film thermal printing heads was also investigated. The results show that; (1) a ln ρT^-1/2 relationship between resistivity and temperature in Ta-Si-C thin films holds good over a wide temperature range from 293 to 873 K, (2) resistivity is dependent of film thickness when film thickness is less than 2000 (greater resistivity in thinner films), (3) the thermal dependence of resistance is dependent on film thickness when film thickness is less than 3000 (greater thermal dependence in thinner films), (4) resistivity is increased and thermal dependence of resistance is decreased by heat treatment below 400 , and that (5) excellent performance is achieved when Ta-Si-C thin films greater than 3000 in thickness are used as the thermal printing head resistor film.},
keywords={},
doi={},
ISSN={},
month={November},}

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TY - JOUR
TI - Effect of Film Thickness on Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads
T2 - IEICE TRANSACTIONS on transactions
SP - 1133
EP - 1139
AU - Tomohiro NAKAMORI
AU - Taiji TSURUOKA
AU - Takashi KANAMORI
AU - Susumu SHIBATA
PY - 1987
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E70-E
IS - 11
JA - IEICE TRANSACTIONS on transactions
Y1 - November 1987
AB - Change in film properties, especially resistivity and the thermal dependence of resistance, that are due to differences in the thickness and the temperature of heat treatment of Ta-Si-C films developed as high resistivity materials were investigated. From these results, the mechanism of film thermal changes was discussed. Further, the effect of film thickness on the performance of Ta-Si-C thin film thermal printing heads was also investigated. The results show that; (1) a ln ρT^-1/2 relationship between resistivity and temperature in Ta-Si-C thin films holds good over a wide temperature range from 293 to 873 K, (2) resistivity is dependent of film thickness when film thickness is less than 2000 (greater resistivity in thinner films), (3) the thermal dependence of resistance is dependent on film thickness when film thickness is less than 3000 (greater thermal dependence in thinner films), (4) resistivity is increased and thermal dependence of resistance is decreased by heat treatment below 400 , and that (5) excellent performance is achieved when Ta-Si-C thin films greater than 3000 in thickness are used as the thermal printing head resistor film.
ER -