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IEICE TRANSACTIONS on transactions

Ellipsometric Analysis for Growth of Contaminant Films on Contact Surface

Terutaka TAMAI, Mitsuo KOMINAMI

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Summary :

By applying the ellipsometric analysis, the relationships between the growth of contaminant film on contact surface and contamination time were clarified with respect to the contact resistance and formation of the film. Contamination parameters for reaction formulas which are concerned with growth laws of contamination films for sulfuration of Ag and for oxidation of Cu were deduced.

Publication
IEICE TRANSACTIONS on transactions Vol.E70-E No.4 pp.343-345
Publication Date
1987/04/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section LETTER (Special Issue: Papers from 1987 National Convention IEICE)
Category
Components and Materials

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