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Shin-ichi TAKAGI Tomohisa MIZUNO Naoharu SUGIYAMA Tsutomu TEZUKA Atsushi KUROBE
An effective way to realize scaled CMOS with both requirements of high current drive and low supply voltage is to introduce high mobility channel such as strained Si. This paper proposes a new device structure using the strained-Si channel, strained-Si-on-Insulator (strained-SOI) MOSFET, applicable to sub-100 nm Si CMOS technology nodes. The device structure and the advantages of strained-SOI MOSFETs are presented. It is demonstrated that strained-SOI MOSFETs are successfully fabricated by combining SIMOX technology with re-growth of strained Si and that n- and p-MOSFETs have mobility of 1.6 and 1.3 times higher than the universal one, respectively. Furthermore, it is also shown that ultra-thin SiGe-on-Insulator (SGOI) virtual substrates with higher Ge content, necessary to further increase mobility and to realize fully-depleted SOI MOSFETs, can be made by oxidation of SGOI structure with lower Ge content.
Tomohisa MIZUNO Naoharu SUGIYAMA Atsushi KUROBE Shin-ichi TAKAGI
We have developed advanced SOI n- and p-MOSFETs with strained-Si channel on insulator (strained-SOI) structure fabricated by SIMOX (separation-by-implanted-oxygen) technology. The characteristics of this strained-SOI substrate and electrical properties of strained-SOI MOSFET's have been experimentally studied. Using strained-Si/relaxed-SiGe epitaxy technology and usual SIMOX process, we have successfully formed the layered structure of fully-strained-Si (20 nm)/fully-relaxed-SiGe film (290 nm) on uniform buried oxide layer (85 nm) inside SiGe layer. Good drain current characteristics have been obtained in strained-SOI MOSFET's. It is found that both electron and hole mobility is enhanced in strained-SOI MOSFET's, compared to the universal mobility in an inversion layer and the mobility of control SOI MOSFET's. These mobility enhancement factors are almost the same as the theoretical results.