Clock driver suffers from delay variation due to manufacturing and environmental variabilities as well as combinational cells. The delay variation causes clock skew and jitter, and varies both setup and hold timing margins. This paper presents a timing verification method that takes into consideration delay variation inside a clock network due to both manufacturing variability and dynamic power supply noise. We also discuss that setup and hold slack computation inherently involves a structural correlation problem due to common paths, and demonstrate that assigning individual random variables to upstream clock drivers provides a notable accuracy improvement in clock skew estimation with limited increase in computational cost. We applied the proposed method to industrial designs in 90 nm process. Experimental results show that dynamic delay variation reduces setup slack by over 500 ps and hold slack by 16.4 ps in test cases.

Influence of manufacturing variability on circuit performance has been increasing because of finer manufacturing process and lowered supply voltage. In this paper, we focus on mesh-style clock distribution which is believed to be effective for reducing clock skew, and we evaluate clock skew considering manufacturing and design variabilities. Considering MOS transistor variation -- random and spatially-correlated variation -- and non-uniform flip-flop (FF) placement, we demonstrate that spatially-correlated variation and severe non-uniform FF distribution can be major sources of clock skew. We also examine the dependency of clock skew on design parameters, and reveal that finer clock mesh does not necessarily reduce clock skew.