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Suichi TAHARA Shuichi NAGASAWA Hideaki NUMATA Yoshihito HASHIMOTO Shinichi YOROZU
Superconductive LSIs with Josephson junctions have features such as low power dissipation and high switching speed. In this paper, we review our developed 4-Kbit RAM with vortex transitional memory cells as an illustration of superconductive LSIs with Josephson junctions. We have developed a fabrication process technology for the 4-Kbit RAM. In the 4-Kbit RAM, 380ps access time and 9.8 mW power dissipation have been experimentally obtained. And also, we have estimated a suitable moat structure to reduce the influence of trapped magnetic structure. The 4-Kbit RAM has been successfully operated with a bit yield of 99.8%. Furthermore, we discuss GHz testing which is one of the most significant issues concerning superconductive digital LSIs.