Soft-error immunity of a 1-V operating CMOS memory cell is described. To evaluate the immunity precisely at the supply voltage of 1 V, a multi-threshold CMOS (MTCMOS) memory scheme, which has a peripheral circuit combining low-threshold CMOS logic gates and high-threshold MOSFETs with a virtual supply line, is adopted as a test structure. A 1-kb memory was designed and fabricated with 0.5-µm MTCMOS technology and the soft-error immunity of the memory cells was evaluated. The results of an alpha-particle exposure test and a pulse laser test show that a full-CMOS memory cell has high immunity at 1-V operations.