Charge redistribution based successive approximation (SA) analog-to-digital converter (ADC) has the advantage of power efficiency. Split capacitor digital-to-analog converter (CDAC) technique implements two sets of binary-weighted capacitor arrays connected by a bridge capacitor so as to reduce both input load capacitance and area. However, capacitor mismatches degrade ADC performance in terms of DNL and INL. In this work, a split CDAC mismatch calibration method is proposed. A bridge capacitor larger than conventional design is implemented so that a tunable capacitor can be added in parallel with the lower-weight capacitor array to compensate for mismatches. To guarantee correct CDAC calibration, comparator offset is cancelled using a digital timing control charge compensation technique. To further reduce the input load capacitance, an extra unit capacitor is added to the higher-weight capacitor array. Instead of the lower-weight capacitor array, the extra unit capacitor and the higher-weight capacitor array sample analog input signal. An 8-bit SA ADC with 4-bit + 4-bit split CDAC has been implemented in a 65 nm CMOS process. The ADC has an input capacitance of 180 fF and occupies an active area of 0.03 mm2. Measured results of +0.2/-0.3LSB DNL and +0.3/-0.3LSB INL have been achieved after calibration.