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[Author] Yoshifumi HATA(1hit)

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  • Microstructure Analysis Technique of Specific Area by Transmission Electron Microscopy

    Yoshifumi HATA  Ryuji ETOH  Hiroshi YAMASHITA  Shinji FUJII  Yoshikazu HARADA  

     
    PAPER

      Vol:
    E77-C No:4
      Page(s):
    590-594

    A procedure for preparing a cross-sectional transmission electron microscopy (TEM) micrograph of a specific area is outlined. A specific area in a specimen has been very difficult to observe with TEM, because a particular small area cannot be preselected in the conventional specimen preparation technique using mechanical polishing, dimpling and ion milling. The technique in this paper uses a focused ion beam (FIB) to fabricate a cross-sectional specimen at a desired area. The applications of this specimen preparation technique are illustrated for investigations of particles in the process of fabricating devices and degraded aluminum/aluminum vias. The specimen preparation technique using FIB is useful for observing a specific area. This technique is also useful for shortening the time of specimen preparation and observing wide areas of LSI devices.