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[Keyword] 45 CMOSFET(1hit)

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  • Electrical Characteristics of n- and p-MOSFETs with Gates Crossing Source/Drain Regions at 90and 45

    Takashi OHZONE  Naoko MATSUYAMA  

     
    PAPER-Device and Circuit Characterization

      Vol:
    E79-C No:2
      Page(s):
    172-178

    The electrical characteristics of sealed CMOSFETs with gates crossing sources/drains at 90 and 45 are experimentally investigated using test devices fabricated by an n-well CMOS process with trench isolation. Gain factors of surface-channel 90 and 45 n-MOSFETs can be estimated by a simple correction theory based on the combination of a center MOSFET and two edge MOSFETs. However, relatively large departures from the theory are observed in buried-channel 90 and 45 p-MOSFETs with widths less than the channel length. The difference between n- and p-MOSFETs is mainly due to the channel type. Other basic device parameters such as saturation drain currents, threshold voltages, subthreshold swings, maximum substrate currents and substrate-voltage dependence of threshold voltages are also measured and qualitatively explained.