Multi-Walled CNT (MWCNT) are synthesized on a silicon wafer and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a gold coated hemispherical surface to form an electrical contact. These switching contacts are tested under conditions typical of MEMS relay applications; 4V, with a static contact force of 1mN, at a low current between 20-50mA. The failure of the switch is identified by the evolution of contact resistance which is monitored throughout the switching cycles. The results show that the contact resistance can be stable for up to 120 million switching cycles, which are 106 orders of higher than state-of-the-art pure gold contact. Bouncing behavior was also observed in each switching cycle. The failing mechanism was also studied in relation to the contact surface changes. It was observed that the contact surfaces undergo a transfer process over the switching life time, ultimately leading to switching failure the number of bounces is also related to the fine transfer failure mechanism.

We initiated development of our own data processing software for laser microscope data with C# language. This software is provided with volume calculation function of a target portion, based on a new calculation algorithm that can precisely handle the volume calculation of the portion located on a tilted surface or on a distorted surface. In this paper, this algorithm and some exemplary results obtained thereby, as well as some further development aims, are briefly described.

In a DC 50 V/3.3 A circuit, the spatial distributions of the spectral intensities of breaking arcs near the cathode for silver contacts were measured on the contact surfaces of three different shapes: flat and spherical (1 mm radius and 2 mm radius) and the arc temperature and the metal-vapor quantity were calculated from the spectral intensities. The influence of the contact shape on the arc temperature and the metal-vapor quantity were also examined, as well as the arc tracks on the contact surfaces and the gain and loss of the contacts. Findings show the distributions of spectral intensities are non-symmetrical from the beginning to the extinction of the breaking arc for the flat contact: However, they are symmetrical in the latter half of the breaking in spite of the number of breaking arcs and the shape of contact surface for the spherical contact. The relationship between the area of the arc tracks on the cathode and the shape of contact surface is the same as the relationship between the existent areas of measured spectra and the shape of the contact surface. For the spherical contacts, the arc temperature and the metal-vapor quantity are affected a little by the radius of the curved of contact surface and the number of breaking arcs. However, the longer the arc duration, the higher the metal-vapor quantity is in the latter period of the breaking arc. For the flat contacts, the metal-vapor quantity is lower than those for the spherical contacts. The gain and loss of the contacts are less and the arc duration is shorter for the flat contact than for the spherical contact.

Simple expressions for constriction resistance of multitude conducting spots were analytically formulated by Greenwood. These expressions, however, include some approximations. Nakamura presented that the constriction resistance of one circular spot computed using the BEM is closed to Maxwell's exact value. This relative error is only e=0. 00162 [%]. In this study, the constriction resistances of two, five and ten conducting spots are computed using the boundary element method (BEM), and compared with those obtained using Greenwood's expressions. As the conducting spots move close to each other, the numerical deviations between constriction resistances computed using Greenwood's expressions and the BEM increase. As a result, mutual resistance computed by the BEM is larger than that obtained from Greenwood's expressions. The numerical deviations between the total resistances computed by Greenwood's expressions and that by the BEM are small. Hence, Greenwood's expressions are valid for the total constriction resistance calculation and can be applied to problems where only the total resistance of two contact surfaces, such as a relay and a switch, is required. However, the numerical deviations between the partial resistances computed by Greenwood's expression and that by the BEM are very large. The partial resistance calculations of multitude conducting spots are beyond the applicable range of Greenwood's expression, since Greenwood's expression for constriction resistance of two conducting spots is obtained by assuming that the conducting spots are equal size. In particular, the deviation between resistances of conducting spots, which are close to each other, is very large. In the case of partial resistances which are significant in semiconductor devices, Greenwood's expressions cannot be used with high precision.

Surface damage of the electrical contact is a primary cause of failure in many electronic devices which use sliding contacts. Therefore, the quantitative observation of the contact surface is one of the most important subjects for improvement of contact reliability. In this study, in order to clarify the relationship between the contact resistance and the damage on the contact surface, a digital image measuring system (DIMS) was developed. A shadow image processing technique (SIPT) was applied to the damage analysis on the sliding contact surface. The damage width on the contact surface and the damaged image could be obtained with a 3-D graphic image by applying both DIMS and SIPT. Part of the relationship between the damage on the contact surface and the contact resistance could be obtained in the case when Cu is used for the moving contact and Cu and Ni are used for the static contact.

In a DC 50 V/5 A circuit, the relationship between the number of breaking arcs and the spatial distribution of the spectral intensity of breaking arcs of long duration near the cathode in palladium contact were examined through substitution of the contact surfaces of three different shapes: flat and spherical (1 mm radius and 2 mm radius). Findings show the distribution of spectral intensity in Pd arcs to be influenced remarkably by the shape of contact surface and the number of breaking arcs. However, the temperature of Pd arcs was affected neither by the shape of contact surface nor by the number of breaking arcs. The metal-vapor quantity present differed for flat and spherical surface contacts; however, it was not affected by the radius of the curved contact surfaces or by the number of breaking arcs. Additionally, the longer the duration of the breaking arc, the more metal-vapor was presented in the beginning of the arc. Furthermore, arc tracks on contact surfaces were observed with microscopes, clarifying that the relationship between the area of the clouded white metal on the cathode and the shape of contact surface is the same as the relationship between the existent area of measured spectra and the shape of the contact surface.