The search functionality is under construction.
The search functionality is under construction.

Keyword Search Result

[Keyword] low temperature bonding(1hit)

1-1hit
  • Optical Microsensors Integration Technologies for Biomedical Applications Open Access

    Eiji HIGURASHI  Renshi SAWADA  Tadatomo SUGA  

     
    INVITED PAPER

      Vol:
    E92-C No:2
      Page(s):
    231-238

    This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.