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This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.
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Eiji HIGURASHI, Renshi SAWADA, Tadatomo SUGA, "Optical Microsensors Integration Technologies for Biomedical Applications" in IEICE TRANSACTIONS on Electronics,
vol. E92-C, no. 2, pp. 231-238, February 2009, doi: 10.1587/transele.E92.C.231.
Abstract: This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E92.C.231/_p
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@ARTICLE{e92-c_2_231,
author={Eiji HIGURASHI, Renshi SAWADA, Tadatomo SUGA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Optical Microsensors Integration Technologies for Biomedical Applications},
year={2009},
volume={E92-C},
number={2},
pages={231-238},
abstract={This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.},
keywords={},
doi={10.1587/transele.E92.C.231},
ISSN={1745-1353},
month={February},}
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TY - JOUR
TI - Optical Microsensors Integration Technologies for Biomedical Applications
T2 - IEICE TRANSACTIONS on Electronics
SP - 231
EP - 238
AU - Eiji HIGURASHI
AU - Renshi SAWADA
AU - Tadatomo SUGA
PY - 2009
DO - 10.1587/transele.E92.C.231
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E92-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 2009
AB - This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.
ER -