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Open Access
Optical Microsensors Integration Technologies for Biomedical Applications

Eiji HIGURASHI, Renshi SAWADA, Tadatomo SUGA

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Summary :

This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.

Publication
IEICE TRANSACTIONS on Electronics Vol.E92-C No.2 pp.231-238
Publication Date
2009/02/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E92.C.231
Type of Manuscript
Special Section INVITED PAPER (Special Section on Recent Advances in Integrated Photonic Devices)
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