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Mototaka OCHI Yoko SHIDA Hiroyuki OKUNO Hiroshi GOTO Toshihiro KUGIMIYA Moriyoshi KANAMARU
An Al-N system optical absorption layer has been developed, to be used for Al-based metal mesh electrodes on touch screen panels. The triple-layered electrode effectively suppresses the optical reflection in both visible light and the blue color region and exhibits excellent wet etching property that accommodates micro-fabrication. Due to its high noise immunity and contact sensitivity originating from its low electrical resistivity, the proposed metal mesh electrodes are useful for touch-sensitive panels in the next generation ultra-high-resolution displays.
Kanji YASUI Yutaka OOSHIMA Yuichiro KUROKI Hiroshi NISHIYAMA Masasuke TAKATA Tadashi AKAHANE
Al doped zinc oxide (AZO) films were deposited using a radio frequency (rf) magnetron sputtering apparatus with a mesh grid electrode. Improvement of crystalline uniformity was achieved by the use of an appropriate negative grid bias to effectively suppress the bombardment of high-energy charged particles onto the film surface. The uniformity of the film's electronic properties, such as resistivity, carrier concentration and Hall mobility, was also improved using the sputtering method. Hydrogen plasma annealing was investigated to further decrease the resistivity of the ZnO films and the carrier concentration was increased by 1-21020 cm-3 without decrease in the Hall mobility.