A voltage-controlled oscillator (VCO) tolerant to process variations at lower supply voltage was proposed. The circuit consists of an on-chip threshold-voltage-monitoring circuit, a current-source circuit, a body- biasing control circuit, and the delay cells of the VCO. Because variations in low-voltage VCO frequency are mainly determined by that of the current in delay cells, a current-compensation technique was adopted by using an on-chip threshold-voltage-monitoring circuit and body-biasing circuit techniques. Monte Carlo SPICE simulations demonstrated that variations in the oscillation frequency by using the proposed techniques were able to be suppressed about 65% at a 1-V supply voltage, compared to frequencies with and without the techniques.