This paper reviews the evolutionary process that reduced the transmission loss of silica optical fibers from the report of 20dB/km by Corning in 1970 to the current record-low loss. At an early stage, the main effort was to remove impurities especially hydroxy groups for fibers with GeO2-SiO2 core, resulting in the loss of 0.20dB/km in 1980. In order to suppress Rayleigh scattering due to composition fluctuation, pure-silica-core fibers were developed, and the loss of 0.154dB/km was achieved in 1986. As the residual main factor of the loss, Rayleigh scattering due to density fluctuation was actively investigated by utilizing IR and Raman spectroscopy in the 1990s and early 2000s. Now, ultra-low-loss fibers with the loss of 0.150dB/km are commercially available in trans-oceanic submarine cable systems.