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IEICE TRANSACTIONS on Communications

Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip

Takuichi HIRANO, Ning LI, Kenichi OKADA

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Summary :

The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.

Publication
IEICE TRANSACTIONS on Communications Vol.E100-B No.5 pp.793-798
Publication Date
2017/05/01
Publicized
2016/11/21
Online ISSN
1745-1345
DOI
10.1587/transcom.2016EBT0004
Type of Manuscript
PAPER
Category
Antennas and Propagation

Authors

Takuichi HIRANO
  Tokyo Institute of Technology
Ning LI
  Chuo University
Kenichi OKADA
  Tokyo Institute of Technology

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