Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

Kenta MIURA; Hiroki MIYAZAKI; Osamu HANAIZUMI

doi:10.1093/ietele/e91-c.10.1669

Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

Kenta MIURA, Hiroki MIYAZAKI, Osamu HANAIZUMI

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We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600 for 20 min, and the peak wavelength was approximately 430 nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta₂O₅/SiO₂ multilayered photonic crystals.

Publication: IEICE TRANSACTIONS on Electronics Vol.E91-C No.10 pp.1669-1672

Publication Date: 2008/10/01

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Online ISSN: 1745-1353

DOI: 10.1093/ietele/e91-c.10.1669

Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)

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Kenta MIURA, Hiroki MIYAZAKI, Osamu HANAIZUMI, "Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering" in IEICE TRANSACTIONS on Electronics, vol. E91-C, no. 10, pp. 1669-1672, October 2008, doi: 10.1093/ietele/e91-c.10.1669.
Abstract: We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600 for 20 min, and the peak wavelength was approximately 430 nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta₂O₅/SiO₂ multilayered photonic crystals.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.10.1669/_p

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@ARTICLE{e91-c_10_1669,
author={Kenta MIURA, Hiroki MIYAZAKI, Osamu HANAIZUMI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering},
year={2008},
volume={E91-C},
number={10},
pages={1669-1672},
abstract={We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600 for 20 min, and the peak wavelength was approximately 430 nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta₂O₅/SiO₂ multilayered photonic crystals.},
keywords={},
doi={10.1093/ietele/e91-c.10.1669},
ISSN={1745-1353},
month={October},}

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TY - JOUR
TI - Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
T2 - IEICE TRANSACTIONS on Electronics
SP - 1669
EP - 1672
AU - Kenta MIURA
AU - Hiroki MIYAZAKI
AU - Osamu HANAIZUMI
PY - 2008
DO - 10.1093/ietele/e91-c.10.1669
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2008
AB - We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600 for 20 min, and the peak wavelength was approximately 430 nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta₂O₅/SiO₂ multilayered photonic crystals.
ER -