IEICE TRANSACTIONS on Electronics
Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
Summary :
We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E91-C No.10 pp.1669-1672
- Publication Date
- 2008/10/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1093/ietele/e91-c.10.1669
- Type of Manuscript
- Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
- Category
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Kenta MIURA, Hiroki MIYAZAKI, Osamu HANAIZUMI, "Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering" in IEICE TRANSACTIONS on Electronics,
vol. E91-C, no. 10, pp. 1669-1672, October 2008, doi: 10.1093/ietele/e91-c.10.1669.
Abstract: We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.10.1669/_p
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@ARTICLE{e91-c_10_1669,
author={Kenta MIURA, Hiroki MIYAZAKI, Osamu HANAIZUMI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering},
year={2008},
volume={E91-C},
number={10},
pages={1669-1672},
abstract={We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600
keywords={},
doi={10.1093/ietele/e91-c.10.1669},
ISSN={1745-1353},
month={October},}
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TY - JOUR
TI - Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
T2 - IEICE TRANSACTIONS on Electronics
SP - 1669
EP - 1672
AU - Kenta MIURA
AU - Hiroki MIYAZAKI
AU - Osamu HANAIZUMI
PY - 2008
DO - 10.1093/ietele/e91-c.10.1669
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2008
AB - We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600
ER -
English
