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IEICE TRANSACTIONS on Electronics

Enhancement-Mode n-Channel GaN MOSFETs Using HfO2 as a Gate Oxide

Shun SUGIURA, Shigeru KISHIMOTO, Takashi MIZUTANI, Masayuki KURODA, Tetsuzo UEDA, Tsuyoshi TANAKA

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Summary :

We have fabricated enhancement-mode n-channel GaN MOSFETs with overlap gate structure on a p-GaN using thick HfO2 as a gate insulator. The maximum transconductance of 23 mS/mm which is 4 times larger, to our knowledge, than the best-reported value of the normally-off GaN MOSFETs with SiO2 gate oxide has been obtained.

Publication
IEICE TRANSACTIONS on Electronics Vol.E91-C No.7 pp.1001-1003
Publication Date
2008/07/01
Publicized
Online ISSN
1745-1353
DOI
10.1093/ietele/e91-c.7.1001
Type of Manuscript
Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007)
Category
Nitride-based Devices

Authors

Keyword

enhancement,  GaN,  MOSFETs,  HfO2