Electrostatic Actuator with Electret

Mitsuo ICHIYA; Fumihiro KASANO; Hiromi NISHIMURA; Jacques LEWINER; Didier PERINO

Electrostatic Actuator with Electret

Mitsuo ICHIYA, Fumihiro KASANO, Hiromi NISHIMURA, Jacques LEWINER, Didier PERINO

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In this paper, an electrostatic actuator with electret is proposed. Electrets are the electrical equivalent of magnets. They are dielectric's carrying a non equilibrium permanent space charge or polarization distribution. This distribution can create either an external electric field or internal properties such as piezo or pyroelectricity. In the first case it is possible to make new types of electrostatic actuators by the external electric field. An electrostatic relay with electret is fabricated to demonstrate the possibility of an electrostatic actuator with electret. The size of relay is 5.2 mm11.5 mm. Its amature beam is 50 µm thick, 2.9 mm wide, 6.3 mm long, and acts as a moving electrode. Facing it, the stationary electrode is 20 µm away from the moving electrode. On the stationary electrode, new type of electret made from SiO₂ is deposited. We have succeeded in making the armature operate at low applied voltage 20 V. On the same structure without electret, we need more than 120 V to make the same armature operation. We have also succeeded in making the armature latching.

Publication: IEICE TRANSACTIONS on Electronics Vol.E78-C No.2 pp.128-131

Publication Date: 1995/02/25

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Type of Manuscript: Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)

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Mitsuo ICHIYA, Fumihiro KASANO, Hiromi NISHIMURA, Jacques LEWINER, Didier PERINO, "Electrostatic Actuator with Electret" in IEICE TRANSACTIONS on Electronics, vol. E78-C, no. 2, pp. 128-131, February 1995, doi: .
Abstract: In this paper, an electrostatic actuator with electret is proposed. Electrets are the electrical equivalent of magnets. They are dielectric's carrying a non equilibrium permanent space charge or polarization distribution. This distribution can create either an external electric field or internal properties such as piezo or pyroelectricity. In the first case it is possible to make new types of electrostatic actuators by the external electric field. An electrostatic relay with electret is fabricated to demonstrate the possibility of an electrostatic actuator with electret. The size of relay is 5.2 mm11.5 mm. Its amature beam is 50 µm thick, 2.9 mm wide, 6.3 mm long, and acts as a moving electrode. Facing it, the stationary electrode is 20 µm away from the moving electrode. On the stationary electrode, new type of electret made from SiO₂ is deposited. We have succeeded in making the armature operate at low applied voltage 20 V. On the same structure without electret, we need more than 120 V to make the same armature operation. We have also succeeded in making the armature latching.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e78-c_2_128/_p

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@ARTICLE{e78-c_2_128,
author={Mitsuo ICHIYA, Fumihiro KASANO, Hiromi NISHIMURA, Jacques LEWINER, Didier PERINO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Electrostatic Actuator with Electret},
year={1995},
volume={E78-C},
number={2},
pages={128-131},
abstract={In this paper, an electrostatic actuator with electret is proposed. Electrets are the electrical equivalent of magnets. They are dielectric's carrying a non equilibrium permanent space charge or polarization distribution. This distribution can create either an external electric field or internal properties such as piezo or pyroelectricity. In the first case it is possible to make new types of electrostatic actuators by the external electric field. An electrostatic relay with electret is fabricated to demonstrate the possibility of an electrostatic actuator with electret. The size of relay is 5.2 mm11.5 mm. Its amature beam is 50 µm thick, 2.9 mm wide, 6.3 mm long, and acts as a moving electrode. Facing it, the stationary electrode is 20 µm away from the moving electrode. On the stationary electrode, new type of electret made from SiO₂ is deposited. We have succeeded in making the armature operate at low applied voltage 20 V. On the same structure without electret, we need more than 120 V to make the same armature operation. We have also succeeded in making the armature latching.},
keywords={},
doi={},
ISSN={},
month={February},}

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TY - JOUR
TI - Electrostatic Actuator with Electret
T2 - IEICE TRANSACTIONS on Electronics
SP - 128
EP - 131
AU - Mitsuo ICHIYA
AU - Fumihiro KASANO
AU - Hiromi NISHIMURA
AU - Jacques LEWINER
AU - Didier PERINO
PY - 1995
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E78-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1995
AB - In this paper, an electrostatic actuator with electret is proposed. Electrets are the electrical equivalent of magnets. They are dielectric's carrying a non equilibrium permanent space charge or polarization distribution. This distribution can create either an external electric field or internal properties such as piezo or pyroelectricity. In the first case it is possible to make new types of electrostatic actuators by the external electric field. An electrostatic relay with electret is fabricated to demonstrate the possibility of an electrostatic actuator with electret. The size of relay is 5.2 mm11.5 mm. Its amature beam is 50 µm thick, 2.9 mm wide, 6.3 mm long, and acts as a moving electrode. Facing it, the stationary electrode is 20 µm away from the moving electrode. On the stationary electrode, new type of electret made from SiO₂ is deposited. We have succeeded in making the armature operate at low applied voltage 20 V. On the same structure without electret, we need more than 120 V to make the same armature operation. We have also succeeded in making the armature latching.
ER -