Recent MEMS Research Activities in Japan

Hiroyuki FUJITA

Recent MEMS Research Activities in Japan

Hiroyuki FUJITA

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Micromechanisms and actuators which are 10-100 micrometers in size are studied by research groups in universities, national research institutes, and private industries in Japan. Some of them belong to a "Micromachine Technology" project lead by MITI (Ministry of International Trade and Industries). Microfabrication technologies based on both IC-compatible processes and mechanical machining are under development. Application-oriented devices in automobile, communication and information industries are also investigated. The research goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics on a chip; this is the fusion of mechanics and electronics in the microscopic world. This paper reviews recent activities in MEMS research in Japan.

Publication: IEICE TRANSACTIONS on Electronics Vol.E80-C No.2 pp.198-205

Publication Date: 1997/02/25

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Type of Manuscript: Special Section INVITED PAPER (Special Issue on Micromachine Technology)

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Hiroyuki FUJITA, "Recent MEMS Research Activities in Japan" in IEICE TRANSACTIONS on Electronics, vol. E80-C, no. 2, pp. 198-205, February 1997, doi: .
Abstract: Micromechanisms and actuators which are 10-100 micrometers in size are studied by research groups in universities, national research institutes, and private industries in Japan. Some of them belong to a "Micromachine Technology" project lead by MITI (Ministry of International Trade and Industries). Microfabrication technologies based on both IC-compatible processes and mechanical machining are under development. Application-oriented devices in automobile, communication and information industries are also investigated. The research goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics on a chip; this is the fusion of mechanics and electronics in the microscopic world. This paper reviews recent activities in MEMS research in Japan.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_198/_p

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@ARTICLE{e80-c_2_198,
author={Hiroyuki FUJITA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Recent MEMS Research Activities in Japan},
year={1997},
volume={E80-C},
number={2},
pages={198-205},
abstract={Micromechanisms and actuators which are 10-100 micrometers in size are studied by research groups in universities, national research institutes, and private industries in Japan. Some of them belong to a "Micromachine Technology" project lead by MITI (Ministry of International Trade and Industries). Microfabrication technologies based on both IC-compatible processes and mechanical machining are under development. Application-oriented devices in automobile, communication and information industries are also investigated. The research goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics on a chip; this is the fusion of mechanics and electronics in the microscopic world. This paper reviews recent activities in MEMS research in Japan.},
keywords={},
doi={},
ISSN={},
month={February},}

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TY - JOUR
TI - Recent MEMS Research Activities in Japan
T2 - IEICE TRANSACTIONS on Electronics
SP - 198
EP - 205
AU - Hiroyuki FUJITA
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - Micromechanisms and actuators which are 10-100 micrometers in size are studied by research groups in universities, national research institutes, and private industries in Japan. Some of them belong to a "Micromachine Technology" project lead by MITI (Ministry of International Trade and Industries). Microfabrication technologies based on both IC-compatible processes and mechanical machining are under development. Application-oriented devices in automobile, communication and information industries are also investigated. The research goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics on a chip; this is the fusion of mechanics and electronics in the microscopic world. This paper reviews recent activities in MEMS research in Japan.
ER -