Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films

Takashi HONDA; Ken Ichi ARAI; Masahiro YAMAGUCHI

Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films

Takashi HONDA, Ken Ichi ARAI, Masahiro YAMAGUCHI

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A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100 µm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500 µm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.

Publication: IEICE TRANSACTIONS on Electronics Vol.E80-C No.2 pp.232-238

Publication Date: 1997/02/25

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Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology)

Category: Actuator

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Takashi HONDA, Ken Ichi ARAI, Masahiro YAMAGUCHI, "Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films" in IEICE TRANSACTIONS on Electronics, vol. E80-C, no. 2, pp. 232-238, February 1997, doi: .
Abstract: A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100 µm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500 µm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_232/_p

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@ARTICLE{e80-c_2_232,
author={Takashi HONDA, Ken Ichi ARAI, Masahiro YAMAGUCHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films},
year={1997},
volume={E80-C},
number={2},
pages={232-238},
abstract={A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100 µm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500 µm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.},
keywords={},
doi={},
ISSN={},
month={February},}

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TY - JOUR
TI - Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films
T2 - IEICE TRANSACTIONS on Electronics
SP - 232
EP - 238
AU - Takashi HONDA
AU - Ken Ichi ARAI
AU - Masahiro YAMAGUCHI
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100 µm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500 µm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.
ER -