Thermally Controlled Magnetization Actuator for Microrelays
Summary :
A thermally controlled magnetization actuator (TCMA) is proposed for micro-mechanical relays. It is actuated by changing the local magnetization of the structure by remote heating using a laser beam. It is fabricated by nickel surface micromachining (a fabrication technique using nickel electroplating). The optical power of the laser diode used to drive the TCMA is about 30 mW. The switching time of the microrelay was experimentally measured to be 10 ms, the same as that of a conventional mechanical relay. The contact force was calculated to be 20 µN, which can be improved by increasing the size of the TCMA.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E80-C No.2 pp.239-245
- Publication Date
- 1997/02/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Micromachine Technology)
- Category
- Actuator
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Keyword
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Etsu HASHIMOTO, Hidenao TANAKA, Yoshio SUZUKI, Yuji UENISHI, Akinori WATABE, "Thermally Controlled Magnetization Actuator for Microrelays" in IEICE TRANSACTIONS on Electronics,
vol. E80-C, no. 2, pp. 239-245, February 1997, doi: .
Abstract: A thermally controlled magnetization actuator (TCMA) is proposed for micro-mechanical relays. It is actuated by changing the local magnetization of the structure by remote heating using a laser beam. It is fabricated by nickel surface micromachining (a fabrication technique using nickel electroplating). The optical power of the laser diode used to drive the TCMA is about 30 mW. The switching time of the microrelay was experimentally measured to be 10 ms, the same as that of a conventional mechanical relay. The contact force was calculated to be 20 µN, which can be improved by increasing the size of the TCMA.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_239/_p
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@ARTICLE{e80-c_2_239,
author={Etsu HASHIMOTO, Hidenao TANAKA, Yoshio SUZUKI, Yuji UENISHI, Akinori WATABE, },
journal={IEICE TRANSACTIONS on Electronics},
title={Thermally Controlled Magnetization Actuator for Microrelays},
year={1997},
volume={E80-C},
number={2},
pages={239-245},
abstract={A thermally controlled magnetization actuator (TCMA) is proposed for micro-mechanical relays. It is actuated by changing the local magnetization of the structure by remote heating using a laser beam. It is fabricated by nickel surface micromachining (a fabrication technique using nickel electroplating). The optical power of the laser diode used to drive the TCMA is about 30 mW. The switching time of the microrelay was experimentally measured to be 10 ms, the same as that of a conventional mechanical relay. The contact force was calculated to be 20 µN, which can be improved by increasing the size of the TCMA.},
keywords={},
doi={},
ISSN={},
month={February},}
Copy
TY - JOUR
TI - Thermally Controlled Magnetization Actuator for Microrelays
T2 - IEICE TRANSACTIONS on Electronics
SP - 239
EP - 245
AU - Etsu HASHIMOTO
AU - Hidenao TANAKA
AU - Yoshio SUZUKI
AU - Yuji UENISHI
AU - Akinori WATABE
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - A thermally controlled magnetization actuator (TCMA) is proposed for micro-mechanical relays. It is actuated by changing the local magnetization of the structure by remote heating using a laser beam. It is fabricated by nickel surface micromachining (a fabrication technique using nickel electroplating). The optical power of the laser diode used to drive the TCMA is about 30 mW. The switching time of the microrelay was experimentally measured to be 10 ms, the same as that of a conventional mechanical relay. The contact force was calculated to be 20 µN, which can be improved by increasing the size of the TCMA.
ER -
English
