We prepared alkoxide solutions to fabricate SrBi2Ta2O9 (SBT) ferroelectric capacitors with IrO2 electrodes. In this process, to minimize excess bismuth, the Sr : Bi : Ta mole ratio was kept at 0. 9 : 2. 1 : 2. 0, i. e. , nearly stoichiometric. Three types of solution - mixed-only (MIX), complexed (COMP), and hydrolyzed (HYD) - were used. The HYD capacitor had low absolute leakage current, 10-7 A/cm2 order, and good saturation properties to 6 V. When voltage was applied to each capacitor at 2 to 6 V, MIX and COMP capacitors showed only partial hysteresis loops due to a high leakage current, reflecting the I-V characteristics. These results are probably due to film density caused by metaloxane network bonding. A fatigue endurance test was conducted using cycling of polarization switching at 6 V using the HYD capacitor with IrO2 electrodes. Slight changes were, however, observed in hysteresis loop configuration, but good hysteresis properties were kept up to 1. 04
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Yukihisa OKADA, Ichiro KOIWA, Kinya ASHIKAGA, Katsuaki KAIFU, "SrBi2Ta2O9 Thin Films Fabricated by Sol-Gel Method with IrO2 Electrodes" in IEICE TRANSACTIONS on Electronics,
vol. E81-C, no. 4, pp. 560-565, April 1998, doi: .
Abstract: We prepared alkoxide solutions to fabricate SrBi2Ta2O9 (SBT) ferroelectric capacitors with IrO2 electrodes. In this process, to minimize excess bismuth, the Sr : Bi : Ta mole ratio was kept at 0. 9 : 2. 1 : 2. 0, i. e. , nearly stoichiometric. Three types of solution - mixed-only (MIX), complexed (COMP), and hydrolyzed (HYD) - were used. The HYD capacitor had low absolute leakage current, 10-7 A/cm2 order, and good saturation properties to 6 V. When voltage was applied to each capacitor at 2 to 6 V, MIX and COMP capacitors showed only partial hysteresis loops due to a high leakage current, reflecting the I-V characteristics. These results are probably due to film density caused by metaloxane network bonding. A fatigue endurance test was conducted using cycling of polarization switching at 6 V using the HYD capacitor with IrO2 electrodes. Slight changes were, however, observed in hysteresis loop configuration, but good hysteresis properties were kept up to 1. 04
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e81-c_4_560/_p
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@ARTICLE{e81-c_4_560,
author={Yukihisa OKADA, Ichiro KOIWA, Kinya ASHIKAGA, Katsuaki KAIFU, },
journal={IEICE TRANSACTIONS on Electronics},
title={SrBi2Ta2O9 Thin Films Fabricated by Sol-Gel Method with IrO2 Electrodes},
year={1998},
volume={E81-C},
number={4},
pages={560-565},
abstract={We prepared alkoxide solutions to fabricate SrBi2Ta2O9 (SBT) ferroelectric capacitors with IrO2 electrodes. In this process, to minimize excess bismuth, the Sr : Bi : Ta mole ratio was kept at 0. 9 : 2. 1 : 2. 0, i. e. , nearly stoichiometric. Three types of solution - mixed-only (MIX), complexed (COMP), and hydrolyzed (HYD) - were used. The HYD capacitor had low absolute leakage current, 10-7 A/cm2 order, and good saturation properties to 6 V. When voltage was applied to each capacitor at 2 to 6 V, MIX and COMP capacitors showed only partial hysteresis loops due to a high leakage current, reflecting the I-V characteristics. These results are probably due to film density caused by metaloxane network bonding. A fatigue endurance test was conducted using cycling of polarization switching at 6 V using the HYD capacitor with IrO2 electrodes. Slight changes were, however, observed in hysteresis loop configuration, but good hysteresis properties were kept up to 1. 04
keywords={},
doi={},
ISSN={},
month={April},}
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TY - JOUR
TI - SrBi2Ta2O9 Thin Films Fabricated by Sol-Gel Method with IrO2 Electrodes
T2 - IEICE TRANSACTIONS on Electronics
SP - 560
EP - 565
AU - Yukihisa OKADA
AU - Ichiro KOIWA
AU - Kinya ASHIKAGA
AU - Katsuaki KAIFU
PY - 1998
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E81-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 1998
AB - We prepared alkoxide solutions to fabricate SrBi2Ta2O9 (SBT) ferroelectric capacitors with IrO2 electrodes. In this process, to minimize excess bismuth, the Sr : Bi : Ta mole ratio was kept at 0. 9 : 2. 1 : 2. 0, i. e. , nearly stoichiometric. Three types of solution - mixed-only (MIX), complexed (COMP), and hydrolyzed (HYD) - were used. The HYD capacitor had low absolute leakage current, 10-7 A/cm2 order, and good saturation properties to 6 V. When voltage was applied to each capacitor at 2 to 6 V, MIX and COMP capacitors showed only partial hysteresis loops due to a high leakage current, reflecting the I-V characteristics. These results are probably due to film density caused by metaloxane network bonding. A fatigue endurance test was conducted using cycling of polarization switching at 6 V using the HYD capacitor with IrO2 electrodes. Slight changes were, however, observed in hysteresis loop configuration, but good hysteresis properties were kept up to 1. 04
ER -