A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies
Summary :
In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given for several capacitor layouts (poly-poly and metal-metal).
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E82-C No.4 pp.624-629
- Publication Date
- 1999/04/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Microelectronic Test Structures)
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Olivier ROUX dit BUISSON, Gerard MORIN, Frederic PAILLARDET, Eric MAZALEYRAT, "A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies" in IEICE TRANSACTIONS on Electronics,
vol. E82-C, no. 4, pp. 624-629, April 1999, doi: .
Abstract: In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given for several capacitor layouts (poly-poly and metal-metal).
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e82-c_4_624/_p
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@ARTICLE{e82-c_4_624,
author={Olivier ROUX dit BUISSON, Gerard MORIN, Frederic PAILLARDET, Eric MAZALEYRAT, },
journal={IEICE TRANSACTIONS on Electronics},
title={A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies},
year={1999},
volume={E82-C},
number={4},
pages={624-629},
abstract={In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given for several capacitor layouts (poly-poly and metal-metal).},
keywords={},
doi={},
ISSN={},
month={April},}
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TY - JOUR
TI - A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies
T2 - IEICE TRANSACTIONS on Electronics
SP - 624
EP - 629
AU - Olivier ROUX dit BUISSON
AU - Gerard MORIN
AU - Frederic PAILLARDET
AU - Eric MAZALEYRAT
PY - 1999
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E82-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 1999
AB - In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given for several capacitor layouts (poly-poly and metal-metal).
ER -
English
