Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation
Summary :
Appropriate meshes are crucial for accurate and efficient 3D process simulation. In this paper, we present a set of tools operating on surface and interface triangulations. These tools allow the improvement of the accuracy of interfaces, the reduction of the number of triangles, and the removal of obtuse not coplanarily compensated triangles. The first tool is used within integrated topography simulation environments based on different data structures, e.g. cell-based and segment-based. The latter two are particularly important for providing appropriate input to mesh generation for 3D process simulation.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E83-C No.8 pp.1338-1342
- Publication Date
- 2000/08/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
- Category
- Numerics
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Eberhard BAR, Jurgen LORENZ, "Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 8, pp. 1338-1342, August 2000, doi: .
Abstract: Appropriate meshes are crucial for accurate and efficient 3D process simulation. In this paper, we present a set of tools operating on surface and interface triangulations. These tools allow the improvement of the accuracy of interfaces, the reduction of the number of triangles, and the removal of obtuse not coplanarily compensated triangles. The first tool is used within integrated topography simulation environments based on different data structures, e.g. cell-based and segment-based. The latter two are particularly important for providing appropriate input to mesh generation for 3D process simulation.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_8_1338/_p
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@ARTICLE{e83-c_8_1338,
author={Eberhard BAR, Jurgen LORENZ, },
journal={IEICE TRANSACTIONS on Electronics},
title={Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation},
year={2000},
volume={E83-C},
number={8},
pages={1338-1342},
abstract={Appropriate meshes are crucial for accurate and efficient 3D process simulation. In this paper, we present a set of tools operating on surface and interface triangulations. These tools allow the improvement of the accuracy of interfaces, the reduction of the number of triangles, and the removal of obtuse not coplanarily compensated triangles. The first tool is used within integrated topography simulation environments based on different data structures, e.g. cell-based and segment-based. The latter two are particularly important for providing appropriate input to mesh generation for 3D process simulation.},
keywords={},
doi={},
ISSN={},
month={August},}
Copy
TY - JOUR
TI - Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation
T2 - IEICE TRANSACTIONS on Electronics
SP - 1338
EP - 1342
AU - Eberhard BAR
AU - Jurgen LORENZ
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 2000
AB - Appropriate meshes are crucial for accurate and efficient 3D process simulation. In this paper, we present a set of tools operating on surface and interface triangulations. These tools allow the improvement of the accuracy of interfaces, the reduction of the number of triangles, and the removal of obtuse not coplanarily compensated triangles. The first tool is used within integrated topography simulation environments based on different data structures, e.g. cell-based and segment-based. The latter two are particularly important for providing appropriate input to mesh generation for 3D process simulation.
ER -
English
