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IEICE TRANSACTIONS on Electronics

Analysis of Injection Current with Electron Temperature for High-K Gate Stacks

Yasuyuki OHKURA, Hiroyuki TAKASHINO, Shoji WAKAHARA, Kenji NISHI

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Summary :

Though, high dielectric constant material is a possible near future solution in order to suppress gate current densities of MOSFETs, the barrier height generally decreases with an increasing dielectric constant. In this paper, the injection current through gate stacks has been calculated while taking into account the electron temperature using the W.K.B. method to understand the impact of the injection current from the drain edge.

Publication
IEICE TRANSACTIONS on Electronics Vol.E86-C No.3 pp.325-329
Publication Date
2003/03/01
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Type of Manuscript
Special Section PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
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