IEICE TRANSACTIONS on Electronics
A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler
Summary :
A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E106-C No.9 pp.486-490
- Publication Date
- 2023/09/01
- Publicized
- 2023/03/16
- Online ISSN
- 1745-1353
- DOI
- 10.1587/transele.2022ECS6013
- Type of Manuscript
- BRIEF PAPER
- Category
- Electronic Circuits
Authors
Koichi MAEZAWA
University of Toyama
Umer FAROOQ
University of Toyama
Masayuki MORI
University of Toyama
Keyword
Latest Issue
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Koichi MAEZAWA, Umer FAROOQ, Masayuki MORI, "A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler" in IEICE TRANSACTIONS on Electronics,
vol. E106-C, no. 9, pp. 486-490, September 2023, doi: 10.1587/transele.2022ECS6013.
Abstract: A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2022ECS6013/_p
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@ARTICLE{e106-c_9_486,
author={Koichi MAEZAWA, Umer FAROOQ, Masayuki MORI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler},
year={2023},
volume={E106-C},
number={9},
pages={486-490},
abstract={A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.},
keywords={},
doi={10.1587/transele.2022ECS6013},
ISSN={1745-1353},
month={September},}
Copy
TY - JOUR
TI - A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler
T2 - IEICE TRANSACTIONS on Electronics
SP - 486
EP - 490
AU - Koichi MAEZAWA
AU - Umer FAROOQ
AU - Masayuki MORI
PY - 2023
DO - 10.1587/transele.2022ECS6013
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E106-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2023
AB - A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
ER -
English
