We achieved detailed characterization of resonant tunneling chaos generator circuits in microwave frequency range. The circuit is analogous to Duffing oscillator, where the third-order nonlinear potential term is emulated by the nonlinear current-voltage curve of the resonant tunneling diode. The circuit includes a periodic reset mechanism to output identical chaos signal, which is essential to observe chaos signal on a sampling oscilloscope. Though this was shown to be effective in our previous papers, the length of the waveforms to observe is limited to rather short period, and it was unclear if this technique can be used for detailed characterization of such high-frequency chaos. In this paper, we improved the circuit design to observe longer waveforms, and demonstrated that the detailed characterization is possible using this periodic resetting technique with a sampling oscilloscope. The hybrid integration scheme is also used in this paper, which allows the easiest and shortest way to mimic a circuit as per circuit design, and precise estimation of circuit parameters aiming to eliminate circuit-related abnormalities. We provide deep insight into the dynamics associated with our circuit, starting from the single period, double period, chaos, and triple period regimes, by extracting power spectra, return maps, phase portraits, and bifurcation diagrams from acquired time series using sampling oscilloscope. Our method to study microwave chaotic signals can be applied to much higher frequency ranges, such as THz frequency range.

A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.