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Effect of Nitrogen-Doped LaB6 Interfacial Layer on Device Characteristics of Pentacene-Based OFET

Yasutaka MAEDA, Shun-ichiro OHMI, Tetsuya GOTO, Tadahiro OHMI

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Summary :

In this paper, the effect of a nitrogen-doped (N-doped) LaB6 interfacial layer (IL) on p-type pentacene-based OFET was investigated. The pentacene-based OFET with top-contact/back-gate geometry was fabricated. A 2-nm-thick N-doped LaB6 interfacial layer deposited on an 8-nm-thick SiO2 gate insulator. A 10-nm-thick pentacene film was deposited by thermal evaporation at 100°C followed by Au contact and Al back gate electrodes formation. The fabricated OFET showed normally- off characteristics and a steep subthreshold swing (SS) of 84 mV/dec. from ID-VG and ID-VD characteristics. Furthermore, the aging characteristics of 6 months after the fabrication were investigated and it was found that VTH and SS were stable when the N-doped LaB6 IL was introduced at the interface between SiO2 gate insulator and pentacene.

Publication
IEICE TRANSACTIONS on Electronics Vol.E100-C No.5 pp.463-467
Publication Date
2017/05/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E100.C.463
Type of Manuscript
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category

Authors

Yasutaka MAEDA
  Tokyo Institute of Technology
Shun-ichiro OHMI
  Tokyo Institute of Technology
Tetsuya GOTO
  Tohoku University
Tadahiro OHMI
  Tohoku University

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