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Analysis of Super-Steep Subthreshold Slope Body-Tied SOI MOSFET and its Possibility for Ultralow Voltage Application

Takayuki MORI, Jiro IDA

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Summary :

In this paper, we review a super-steep subthreshold slope (SS) (<1 mV/dec) body-tied (BT) silicon on insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) fabricated with 0.15 µm SOI technology and discuss the possibility of its use in ultralow voltage applications. The mechanism of the super-steep SS in the BT SOI MOSFET was investigated with technology computer-aided design simulation. The gate length/width and Si thickness optimizations promise further reductions in operation voltage, as well as improvement of the ION/IOFF ratio. In addition, we demonstrated control of the threshold voltage and hysteresis characteristics using the substrate and body bias in the BT SOI MOSFET.

Publication
IEICE TRANSACTIONS on Electronics Vol.E101-C No.11 pp.916-922
Publication Date
2018/11/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E101.C.916
Type of Manuscript
PAPER
Category
Semiconductor Materials and Devices

Authors

Takayuki MORI
  Kanazawa Institute of Technology
Jiro IDA
  Kanazawa Institute of Technology

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