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Simulation of Retention Characteristics in Double-Gate Structure Multi-Bit SONOS Flash Memory

Doo-Hyun KIM, Il Han PARK, Seongjae CHO, Jong Duk LEE, Hyungcheol SHIN, Byung-Gook PARK

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Summary :

This paper presents a detailed study of the retention characteristics in scaled multi-bit SONOS flash memories. By calculating the oxide field and tunneling currents, we evaluate the charge trapping mechanism. We calculate transient retention dynamics with the ONO fields, trapped charge, and tunneling currents. All the parameters were obtained by physics-based equations and without any fitting parameters or optimization steps. The results can be used with nanoscale nonvolatile memory. This modeling accounts for the VT shift as a function of trapped charge density, time, silicon fin thickness and type of trapped charge, and can be used for optimizing the ONO geometry and parameters for maximum performance.

Publication
IEICE TRANSACTIONS on Electronics Vol.E92-C No.5 pp.659-663
Publication Date
2009/05/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E92.C.659
Type of Manuscript
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
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