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IEICE TRANSACTIONS on Electronics

High-Performance Modulation-Doped Heterostructure-Thermopiles for Uncooled Infrared Image-Sensor Application

Masayuki ABE, Noriaki KOGUSHI, Kian Siong ANG, René HOFSTETTER, Kumar MANOJ, Louis Nicholas RETNAM, Hong WANG, Geok Ing NG, Chon JIN, Dimitris PAVLIDIS

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Summary :

Novel thermopiles based on modulation doped AlGaAs/InGaAs and AlGaN/GaN heterostructures are proposed and developed for the first time, for uncooled infrared FPA (Focal Plane Array) image sensor application. The high responsivity with the high speed response time are designed to 4,900 V/W with 110 µs for AlGaAs/InGaAs, and to 460 V/W with 9 µs for AlGaN/GaN thermopiles, respectively. Based on integrated HEMT-MEMS technology, the AlGaAs/InGaAs 3232 matrix FPAs are fabricated to demonstrate its enhanced performances by black body measurement. The technology presented here demonstrates the potential of this approach for low-cost uncooled infrared FPA image sensor application.

Publication
IEICE TRANSACTIONS on Electronics Vol.E95-C No.8 pp.1354-1362
Publication Date
2012/08/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E95.C.1354
Type of Manuscript
Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2011)
Category
GaN-based Devices

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