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IEICE TRANSACTIONS on Electronics

Compact Analytical Threshold Voltage Model of Strained Gate-All-Around MOSFET Fabricated on Si1-xGex Virtual Substrate

Yefei ZHANG, Zunchao LI, Chuang WANG, Feng LIANG

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Summary :

In this paper, an analytical threshold voltage model of the strained gate-all-around MOSFET fabricated on the Si1-xGex virtual substrate is presented by solving the two-dimensional Poisson equation. The impact of key parameters such as the strain, channel length, gate oxide thickness and radius of the silicon cylinder on the threshold voltage has been investigated. It has been demonstrated that the threshold voltage decreases as the strain in the channel increases. The threshold voltage roll-off becomes severe when increasing the Ge content in the Si1-xGex virtual substrate. The model is found to tally well with the device simulator.

Publication
IEICE TRANSACTIONS on Electronics Vol.E99-C No.2 pp.302-307
Publication Date
2016/02/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E99.C.302
Type of Manuscript
PAPER
Category
Semiconductor Materials and Devices

Authors

Yefei ZHANG
  Xi'an Jiaotong University
Zunchao LI
  Xi'an Jiaotong University
Chuang WANG
  Xi'an Jiaotong University
Feng LIANG
  Xi'an Jiaotong University

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