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Statistical Modeling of a Via Distribution for Yield Estimation

Takumi UEZONO, Kenichi OKADA, Kazuya MASU

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Summary :

In this paper, we propose a via distribution model for yield estimation. This model expresses a relationship between the number of vias and wire length. We also provide an estimate for the total number of vias in a circuit, derived from the via distribution and the wire-length distribution. The via distribution is modeled as a function of track utilization, and the wire-length distribution can be derived from the gate-level netlist and the layout area. We extract model parameters from the commercial chips designed for 0.18-µm and 0.13-µm CMOS processes, and demonstrate the yield degradation caused by vias.

Publication
IEICE TRANSACTIONS on Fundamentals Vol.E89-A No.12 pp.3579-3584
Publication Date
2006/12/01
Publicized
Online ISSN
1745-1337
DOI
10.1093/ietfec/e89-a.12.3579
Type of Manuscript
Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category
Interconnect

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