Automatic Defect Classification System in Semiconductors EDS Test Based on System Entity Structure Methodology

Young-Shin HAN; SoYoung KIM; TaeKyu KIM; Jason J. JUNG

doi:10.1587/transinf.E93.D.2001

Automatic Defect Classification System in Semiconductors EDS Test Based on System Entity Structure Methodology

Young-Shin HAN, SoYoung KIM, TaeKyu KIM, Jason J. JUNG

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We exploit a structural knowledge representation scheme called System Entity Structure (SES) methodology to represent and manage wafer failure patterns which can make a significant influence to FABs in the semiconductor industry. It is important for the engineers to simulate various system verification processes by using predefined system entities (e.g., decomposition, taxonomy, and coupling relationships of a system) contained in the SES. For better computational performance, given a certain failure pattern, a Pruned SES (PES) can be extracted by selecting the only relevant system entities from the SES. Therefore, the SES-based simulation system allows the engineers to efficiently evaluate and monitor semiconductor data by i) analyzing failures to find out the corresponding causes and ii) managing historical data related to such failures.

Publication: IEICE TRANSACTIONS on Information Vol.E93-D No.7 pp.2001-2004

Publication Date: 2010/07/01

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Online ISSN: 1745-1361

DOI: 10.1587/transinf.E93.D.2001

Type of Manuscript: LETTER

Category: Artificial Intelligence, Data Mining

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Young-Shin HAN, SoYoung KIM, TaeKyu KIM, Jason J. JUNG, "Automatic Defect Classification System in Semiconductors EDS Test Based on System Entity Structure Methodology" in IEICE TRANSACTIONS on Information, vol. E93-D, no. 7, pp. 2001-2004, July 2010, doi: 10.1587/transinf.E93.D.2001.
Abstract: We exploit a structural knowledge representation scheme called System Entity Structure (SES) methodology to represent and manage wafer failure patterns which can make a significant influence to FABs in the semiconductor industry. It is important for the engineers to simulate various system verification processes by using predefined system entities (e.g., decomposition, taxonomy, and coupling relationships of a system) contained in the SES. For better computational performance, given a certain failure pattern, a Pruned SES (PES) can be extracted by selecting the only relevant system entities from the SES. Therefore, the SES-based simulation system allows the engineers to efficiently evaluate and monitor semiconductor data by i) analyzing failures to find out the corresponding causes and ii) managing historical data related to such failures.
URL: https://global.ieice.org/en_transactions/information/10.1587/transinf.E93.D.2001/_p

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@ARTICLE{e93-d_7_2001,
author={Young-Shin HAN, SoYoung KIM, TaeKyu KIM, Jason J. JUNG, },
journal={IEICE TRANSACTIONS on Information},
title={Automatic Defect Classification System in Semiconductors EDS Test Based on System Entity Structure Methodology},
year={2010},
volume={E93-D},
number={7},
pages={2001-2004},
abstract={We exploit a structural knowledge representation scheme called System Entity Structure (SES) methodology to represent and manage wafer failure patterns which can make a significant influence to FABs in the semiconductor industry. It is important for the engineers to simulate various system verification processes by using predefined system entities (e.g., decomposition, taxonomy, and coupling relationships of a system) contained in the SES. For better computational performance, given a certain failure pattern, a Pruned SES (PES) can be extracted by selecting the only relevant system entities from the SES. Therefore, the SES-based simulation system allows the engineers to efficiently evaluate and monitor semiconductor data by i) analyzing failures to find out the corresponding causes and ii) managing historical data related to such failures.},
keywords={},
doi={10.1587/transinf.E93.D.2001},
ISSN={1745-1361},
month={July},}

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TY - JOUR
TI - Automatic Defect Classification System in Semiconductors EDS Test Based on System Entity Structure Methodology
T2 - IEICE TRANSACTIONS on Information
SP - 2001
EP - 2004
AU - Young-Shin HAN
AU - SoYoung KIM
AU - TaeKyu KIM
AU - Jason J. JUNG
PY - 2010
DO - 10.1587/transinf.E93.D.2001
JO - IEICE TRANSACTIONS on Information
SN - 1745-1361
VL - E93-D
IS - 7
JA - IEICE TRANSACTIONS on Information
Y1 - July 2010
AB - We exploit a structural knowledge representation scheme called System Entity Structure (SES) methodology to represent and manage wafer failure patterns which can make a significant influence to FABs in the semiconductor industry. It is important for the engineers to simulate various system verification processes by using predefined system entities (e.g., decomposition, taxonomy, and coupling relationships of a system) contained in the SES. For better computational performance, given a certain failure pattern, a Pruned SES (PES) can be extracted by selecting the only relevant system entities from the SES. Therefore, the SES-based simulation system allows the engineers to efficiently evaluate and monitor semiconductor data by i) analyzing failures to find out the corresponding causes and ii) managing historical data related to such failures.
ER -