Precise Control of Grating Pitch by Electron-Beam Exposure System for Integrated Optics

Kazuhito FURUYA; Kenji YOSHIDA; Kimiyasu HONJO; Yasuharu SUEMATSU

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Kazuhito FURUYA, Kenji YOSHIDA, Kimiyasu HONJO, Yasuharu SUEMATSU, "Precise Control of Grating Pitch by Electron-Beam Exposure System for Integrated Optics" in IEICE TRANSACTIONS on transactions, vol. E66-E, no. 9, pp. 561-562, September 1983, doi: .
Abstract: A pitch of a grating drawn by an electron beam was controlled precisely within 10 by attaching an attenuator to a conventional electron-beam-exposure system. This technique may be applied for fabrication of a periodic structure for integrated optics.
URL: https://global.ieice.org/en_transactions/transactions/10.1587/e66-e_9_561/_p

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@ARTICLE{e66-e_9_561,
author={Kazuhito FURUYA, Kenji YOSHIDA, Kimiyasu HONJO, Yasuharu SUEMATSU, },
journal={IEICE TRANSACTIONS on transactions},
title={Precise Control of Grating Pitch by Electron-Beam Exposure System for Integrated Optics},
year={1983},
volume={E66-E},
number={9},
pages={561-562},
abstract={A pitch of a grating drawn by an electron beam was controlled precisely within 10 by attaching an attenuator to a conventional electron-beam-exposure system. This technique may be applied for fabrication of a periodic structure for integrated optics.},
keywords={},
doi={},
ISSN={},
month={September},}

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TY - JOUR
TI - Precise Control of Grating Pitch by Electron-Beam Exposure System for Integrated Optics
T2 - IEICE TRANSACTIONS on transactions
SP - 561
EP - 562
AU - Kazuhito FURUYA
AU - Kenji YOSHIDA
AU - Kimiyasu HONJO
AU - Yasuharu SUEMATSU
PY - 1983
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E66-E
IS - 9
JA - IEICE TRANSACTIONS on transactions
Y1 - September 1983
AB - A pitch of a grating drawn by an electron beam was controlled precisely within 10 by attaching an attenuator to a conventional electron-beam-exposure system. This technique may be applied for fabrication of a periodic structure for integrated optics.
ER -

IEICE TRANSACTIONS on transactions