TRIMEDES: A Triangular Mesh Device Simulator Linked with Topography/Process Simulation

Naoyuki SHIGYO; Koichi SATO; Koichi KATO; Tetsunori WADA

TRIMEDES: A Triangular Mesh Device Simulator Linked with Topography/Process Simulation

Naoyuki SHIGYO, Koichi SATO, Koichi KATO, Tetsunori WADA

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This paper describes a newly developed triangular mesh device simulator, TRIMEDES. TRIMEDES is merged into a supervised simulation system which covers the range from pattern layout to topography/process simulation and also to device simulation. TRIMEDES features an automatic triangular mesh generation capability, and a liking method between a topography/process simulator and a device simulator. The procedure employed in the triangular mesh generation involves the following techniques; (1) primary mesh generation, (2) feedback rate method in order to achieve smooth element size variation, and (3) relaxation technique after mesh generation to suppress obtuse triangles. This procedure proves to be effective and robust in the mesh generation for nonplanar device structures. In order to link the device simulator TRIMEDES to the topograhpy/process simulator, the device shape is represented as closed-loop string topography data and a triangular mesh is generated based on the string data. The pre-processor of the mesh generator has been developed, which rearranges the string data to cope with the mesh generation. The geometrical shape of a device can be reflected in the device simulation, since the string shape data of the topography/process simulation are smoothly transferred to the device simulator.

Publication: IEICE TRANSACTIONS on transactions Vol.E71-E No.10 pp.992-999

Publication Date: 1988/10/25

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Type of Manuscript: PAPER

Category: Semiconductors; Materials and Devices

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Naoyuki SHIGYO
Koichi SATO
Koichi KATO
Tetsunori WADA

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Naoyuki SHIGYO, Koichi SATO, Koichi KATO, Tetsunori WADA, "TRIMEDES: A Triangular Mesh Device Simulator Linked with Topography/Process Simulation" in IEICE TRANSACTIONS on transactions, vol. E71-E, no. 10, pp. 992-999, October 1988, doi: .
Abstract: This paper describes a newly developed triangular mesh device simulator, TRIMEDES. TRIMEDES is merged into a supervised simulation system which covers the range from pattern layout to topography/process simulation and also to device simulation. TRIMEDES features an automatic triangular mesh generation capability, and a liking method between a topography/process simulator and a device simulator. The procedure employed in the triangular mesh generation involves the following techniques; (1) primary mesh generation, (2) feedback rate method in order to achieve smooth element size variation, and (3) relaxation technique after mesh generation to suppress obtuse triangles. This procedure proves to be effective and robust in the mesh generation for nonplanar device structures. In order to link the device simulator TRIMEDES to the topograhpy/process simulator, the device shape is represented as closed-loop string topography data and a triangular mesh is generated based on the string data. The pre-processor of the mesh generator has been developed, which rearranges the string data to cope with the mesh generation. The geometrical shape of a device can be reflected in the device simulation, since the string shape data of the topography/process simulation are smoothly transferred to the device simulator.
URL: https://global.ieice.org/en_transactions/transactions/10.1587/e71-e_10_992/_p

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@ARTICLE{e71-e_10_992,
author={Naoyuki SHIGYO, Koichi SATO, Koichi KATO, Tetsunori WADA, },
journal={IEICE TRANSACTIONS on transactions},
title={TRIMEDES: A Triangular Mesh Device Simulator Linked with Topography/Process Simulation},
year={1988},
volume={E71-E},
number={10},
pages={992-999},
abstract={This paper describes a newly developed triangular mesh device simulator, TRIMEDES. TRIMEDES is merged into a supervised simulation system which covers the range from pattern layout to topography/process simulation and also to device simulation. TRIMEDES features an automatic triangular mesh generation capability, and a liking method between a topography/process simulator and a device simulator. The procedure employed in the triangular mesh generation involves the following techniques; (1) primary mesh generation, (2) feedback rate method in order to achieve smooth element size variation, and (3) relaxation technique after mesh generation to suppress obtuse triangles. This procedure proves to be effective and robust in the mesh generation for nonplanar device structures. In order to link the device simulator TRIMEDES to the topograhpy/process simulator, the device shape is represented as closed-loop string topography data and a triangular mesh is generated based on the string data. The pre-processor of the mesh generator has been developed, which rearranges the string data to cope with the mesh generation. The geometrical shape of a device can be reflected in the device simulation, since the string shape data of the topography/process simulation are smoothly transferred to the device simulator.},
keywords={},
doi={},
ISSN={},
month={October},}

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TY - JOUR
TI - TRIMEDES: A Triangular Mesh Device Simulator Linked with Topography/Process Simulation
T2 - IEICE TRANSACTIONS on transactions
SP - 992
EP - 999
AU - Naoyuki SHIGYO
AU - Koichi SATO
AU - Koichi KATO
AU - Tetsunori WADA
PY - 1988
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E71-E
IS - 10
JA - IEICE TRANSACTIONS on transactions
Y1 - October 1988
AB - This paper describes a newly developed triangular mesh device simulator, TRIMEDES. TRIMEDES is merged into a supervised simulation system which covers the range from pattern layout to topography/process simulation and also to device simulation. TRIMEDES features an automatic triangular mesh generation capability, and a liking method between a topography/process simulator and a device simulator. The procedure employed in the triangular mesh generation involves the following techniques; (1) primary mesh generation, (2) feedback rate method in order to achieve smooth element size variation, and (3) relaxation technique after mesh generation to suppress obtuse triangles. This procedure proves to be effective and robust in the mesh generation for nonplanar device structures. In order to link the device simulator TRIMEDES to the topograhpy/process simulator, the device shape is represented as closed-loop string topography data and a triangular mesh is generated based on the string data. The pre-processor of the mesh generator has been developed, which rearranges the string data to cope with the mesh generation. The geometrical shape of a device can be reflected in the device simulation, since the string shape data of the topography/process simulation are smoothly transferred to the device simulator.
ER -