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[Author] Jae Young SONG(1hit)

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  • Design and Simulation of Asymmetric MOSFETs

    Jong Pil KIM  Woo Young CHOI  Jae Young SONG  Seongjae CHO  Sang Wan KIM  Jong Duk LEE  Byung-Gook PARK  

     
    PAPER-Junction Formation and TFT Reliability

      Vol:
    E90-C No:5
      Page(s):
    978-982

    A novel asymmetric MOSFET with no LDD on the source side is simulated on bulk-Si using a device simulator (SILVACO). In order to overcome the problems of the conventional asymmetric process, a novel asymmetric MOSFET using mesa structure and sidewall spacer gate is proposed which provides self-alignment process, aggressive scaling, and uniformity. First of all, we have simulated to compare the characteristics between asymmetric and symmetric MOSFETs. Basically, both asymmetric and symmetric MOSFETs have an n-type channel (25-nm) and the same physical parameters. When we compare this with the 25-nm symmetric MOSFET, the proposed asymmetric MOSFET shows better device performances.